Herstellung von Polymer- und Polymer-Metalloxid-Kompositschichten: Beschichtungstechniken für optische Interferenzschichtsysteme

Organic materials are not yet commonly used for optical interference layer systems. The reasons therefor are their low mechanical resistivity, their often more complex deposition techniques and their poorer optical properties compared with oxide thin films. However some organic materials offer special properties that are useful for the application in optical layer systems. Because of its high mechanical flexibility mechanical stress in layer systems can be reduced. Some organic materials show specific optical properties like fluorescence or intensive colors that can be used for optical layer systems. Hydrophilic and hydrophobic organic top coatings can improve the pollution behavior of optical layer systems. Therefore we present in this work some gas phase deposition techniques for organic substances and report about some basic optical and mechanical properties of thin films coated with these as well as some important process characteristics