Highly productive technologies for precison optics will be presented. Film properties of multi-layer and gradient coatings as well as results regarding reproducibility, climatic stability and LIDT will be shown
The manufacture of precision optical interference coatings requires a process with sufficient accura...
Sputtering of high-precision optical coatings with a large number of layers as well as high precisio...
In today's sputtering solutions in the field of precision optics, usually planar targets are used wh...
The upscaling of highly productive coating technologies for precison optics and appropriate equipmen...
Optical films of high density and good environmental stability can be deposited at high deposition r...
Different magnetron sputter geometries and modes for the deposition of optical coatings are presente...
Reactive pulse magnetron sputtering of a metal target in a reactive gas atmosphere is used for depos...
Besides classical multilayer systems with alternating low and high refractive indices, reactive puls...
Reactive pulsed magnetron sputtering incorporates a high potential to manufacture optical multi laye...
Pulse magnetron sputtering is very well suited for the deposition of optical coatings. Due to energe...
Reactive magnetron sputtering was used to deposit multilayer optical coatings as well as Rugate filt...
Reactive magnetron sputtering processes have gained considerable interest for the production of prec...
Reactive pulse magnetron sputtering processes are of increasing interest for the deposition of high-...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
A turntable magnetron sputter system based on cylindrical magnetrons was used to investigate particl...
The manufacture of precision optical interference coatings requires a process with sufficient accura...
Sputtering of high-precision optical coatings with a large number of layers as well as high precisio...
In today's sputtering solutions in the field of precision optics, usually planar targets are used wh...
The upscaling of highly productive coating technologies for precison optics and appropriate equipmen...
Optical films of high density and good environmental stability can be deposited at high deposition r...
Different magnetron sputter geometries and modes for the deposition of optical coatings are presente...
Reactive pulse magnetron sputtering of a metal target in a reactive gas atmosphere is used for depos...
Besides classical multilayer systems with alternating low and high refractive indices, reactive puls...
Reactive pulsed magnetron sputtering incorporates a high potential to manufacture optical multi laye...
Pulse magnetron sputtering is very well suited for the deposition of optical coatings. Due to energe...
Reactive magnetron sputtering was used to deposit multilayer optical coatings as well as Rugate filt...
Reactive magnetron sputtering processes have gained considerable interest for the production of prec...
Reactive pulse magnetron sputtering processes are of increasing interest for the deposition of high-...
The planar magnetron cathode was introduced in 1974. Magnetron sputtering has become the most import...
A turntable magnetron sputter system based on cylindrical magnetrons was used to investigate particl...
The manufacture of precision optical interference coatings requires a process with sufficient accura...
Sputtering of high-precision optical coatings with a large number of layers as well as high precisio...
In today's sputtering solutions in the field of precision optics, usually planar targets are used wh...
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