The light scattering of interference coatings is strongly dependent on the wavelength. In addition to the general strong increase of scattering as the wavelengths get shorter, dramatic scatter effects in and around the resonance regions can occur. This is discussed in detail for highly reflective and chirped mirrors. A new instrument is presented which enables spectral angle resolved scatter measurements of high-quality optical components to be performed between 250 and 1500 nm
The recent developments in semiconductor lithography place challenging demands on optical components...
Light scattering of optical components caused by residual imperfections can be a critical factor for...
QC 351 A7 no. 74Measurements of the scattering of reflected light as a function of angular separatio...
The light scattering of interference coatings is strongly dependent on the wavelength. Dramatic scat...
International audienceDue to the diversity and complexity of optical functions they address, optical...
Light scattering metrology has become more and more important with the development of cutting-edge o...
Light scattering from interface imperfections or defects is a topic of persistent interest. On the o...
A method for spectrally resolved damage testing at wavelengths ranging from 250 nm to 1700 nm has be...
An instrument for total backscattering and forward-scattering measurements of optical coating compon...
Driven by the ever increasing requirements for optical surfaces, components and systems light increa...
The light scattering properties of multilayer coatings is substantially more complex than that of si...
Light scattered from interface imperfections carries valuable information about its origins. For sin...
General categories of coatings are defied in terms of the particular influence of the substrate and ...
Roughness-induced light scattering critically affects the performance of optical components, in part...
Light scattering measurement and analysis is a powerful tool for the characterization of optical and...
The recent developments in semiconductor lithography place challenging demands on optical components...
Light scattering of optical components caused by residual imperfections can be a critical factor for...
QC 351 A7 no. 74Measurements of the scattering of reflected light as a function of angular separatio...
The light scattering of interference coatings is strongly dependent on the wavelength. Dramatic scat...
International audienceDue to the diversity and complexity of optical functions they address, optical...
Light scattering metrology has become more and more important with the development of cutting-edge o...
Light scattering from interface imperfections or defects is a topic of persistent interest. On the o...
A method for spectrally resolved damage testing at wavelengths ranging from 250 nm to 1700 nm has be...
An instrument for total backscattering and forward-scattering measurements of optical coating compon...
Driven by the ever increasing requirements for optical surfaces, components and systems light increa...
The light scattering properties of multilayer coatings is substantially more complex than that of si...
Light scattered from interface imperfections carries valuable information about its origins. For sin...
General categories of coatings are defied in terms of the particular influence of the substrate and ...
Roughness-induced light scattering critically affects the performance of optical components, in part...
Light scattering measurement and analysis is a powerful tool for the characterization of optical and...
The recent developments in semiconductor lithography place challenging demands on optical components...
Light scattering of optical components caused by residual imperfections can be a critical factor for...
QC 351 A7 no. 74Measurements of the scattering of reflected light as a function of angular separatio...