Variability-aware compact model strategy for 20-nm bulk MOSFETs

In this paper a variability-aware compact modeling strategy is presented for 20-nm bulk planar technology, taking into account the critical dimension long-range process variation and local statistical variability. Process and device simulations and statistical simulations for a wide range of combinations of L and W are carefully carried out using a design of experiments approach. The variability aware compact model strategy features a comprehensively extracted nominal model and two groups of selected parameters for extractions of the long-range process variation and statistical variability. The unified variability compact modeling method can provide a simulation frame for variability aware technology circuit co-optimization