The apparatus has a suction head (10) that is arranged next to the material removal tool (3) with a particle flow (P) facing suction port (11) on a spatially fixed axis of rotation (D). A guiding unit (4) is movably supported by a drive unit (6) about the axis of movement trajectory. A particle flow detecting sensor unit (12) is arranged in a suction space, for generating sensor signals. The sensor unit is directly or indirectly connected to an evaluation and control unit (13) for generating control signals for controlling the drive unit on the basis of the sensor signals. An independent claim is included for suction method for producing particle flow
The appliance determines the time taken for drops of liquid forced through the needle (4) of a syrin...
The invention relates to a device (1) comprising an opening (2) which defines a fluidic connection b...
Until now the emphasis in contamination control and monitoring under cleanroom conditions has mainly...
The device has columnar fan unit (GE) that is arranged in exit orifice for producing air flow which ...
DE 10231300 A UPAB: 20040305 NOVELTY - The method involves using two light sensors (21,22), with the...
Particulate removal devices operate basically on the principle that a gas stream contain-ing particl...
DE 19755477 A UPAB: 19990806 NOVELTY - The device has a sensor to monitor the fluid quality, a devic...
An exhaust device (1, 20, 40) is proposed for exhausting particles (8, 29), such as chips and/or dus...
DE 102009030691 A1 UPAB: 20110119 NOVELTY - The head has a measuring region (2) in which a fluid e.g...
The invention relates to a method for operating an electrostatic particle collector (1, 28, 38, 46),...
Separation of particle fraction from particle stream in a fluid e.g. aqueous liquid medium under gra...
DE 102009022353 A1 UPAB: 20101130 NOVELTY - The method for isolation of particles (110) suspended in...
A measuring arrangement includes an electrostatic concentrator, a surface and an imaging sensor whic...
The operating field uses a pressure sensitive and see-through layer provided to detect the position ...
A sensor device for sensing particles of a sample, the sensor device comprising a sensing unit adapt...
The appliance determines the time taken for drops of liquid forced through the needle (4) of a syrin...
The invention relates to a device (1) comprising an opening (2) which defines a fluidic connection b...
Until now the emphasis in contamination control and monitoring under cleanroom conditions has mainly...
The device has columnar fan unit (GE) that is arranged in exit orifice for producing air flow which ...
DE 10231300 A UPAB: 20040305 NOVELTY - The method involves using two light sensors (21,22), with the...
Particulate removal devices operate basically on the principle that a gas stream contain-ing particl...
DE 19755477 A UPAB: 19990806 NOVELTY - The device has a sensor to monitor the fluid quality, a devic...
An exhaust device (1, 20, 40) is proposed for exhausting particles (8, 29), such as chips and/or dus...
DE 102009030691 A1 UPAB: 20110119 NOVELTY - The head has a measuring region (2) in which a fluid e.g...
The invention relates to a method for operating an electrostatic particle collector (1, 28, 38, 46),...
Separation of particle fraction from particle stream in a fluid e.g. aqueous liquid medium under gra...
DE 102009022353 A1 UPAB: 20101130 NOVELTY - The method for isolation of particles (110) suspended in...
A measuring arrangement includes an electrostatic concentrator, a surface and an imaging sensor whic...
The operating field uses a pressure sensitive and see-through layer provided to detect the position ...
A sensor device for sensing particles of a sample, the sensor device comprising a sensing unit adapt...
The appliance determines the time taken for drops of liquid forced through the needle (4) of a syrin...
The invention relates to a device (1) comprising an opening (2) which defines a fluidic connection b...
Until now the emphasis in contamination control and monitoring under cleanroom conditions has mainly...