Sub-Wavelength EUV imaging with 12.6nm spatial resolution employing 13.5nm high harmonic beams
- Mancini G. F.
- Gardner D. F.
- Tanksalvala M.
- Shanblatt E. R.
- Zhang X.
- Galloway B. R.
- Porter C. R.
- Karl R.
- Bevis C.
- Kapteyn H.
- Murnane M. M.
- Adams D. E.
DOIAbstract
We demonstrate a record sub-wavelength 12.6nm spatial resolution for EUV imaging using 13.5nm illumination from a high-harmonic light source. Modulus enforced probe ptychographic coherent diffractive imaging allows for large-field quantitative imaging of nearperiodic objects
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