Add to ORKGThe use of ultra-thin glass (UTG), with thicknesses lower than 200 μm, in microelectronic applications is being currently pushed forward in order to substitute silicon as substrate material or polymers as encapsulation materials in ultra-thin packages or OLED devices. Physical vapor deposition methods (PVD) are often used to realize thin-layers like ITO with electrical functionality and conductivity. The generated intrinsic stresses of the thin-layers can influence the mechanical properties and reliability of multilayer systems. In this study DC magnetron sputtering was used for thin film ITO coatings on different UTG substrates. The correlation between process parameters for layer deposition, electrical properties for the ITO thin-layers a...
[[abstract]]In this research, we studied the effect of deflection on the characteristics of an indiu...
A large area magnetron source with the strongly confined magnetic field from all direction is applie...
This study presents the effect of oxygen flow rate on the optical, electrical, and mechanical proper...
In microelectronic applications the use of ultra-thin glass (UTG) to substitute materials like polym...
Tin doped indium oxide (ITO) coatings have been deposited on epoxy resin and glass substrates by low...
Tin doped indium oxide (ITO) coatings have been deposited on epoxy resin and glass substrates by low...
[[abstract]]Experiments were conducted using pulse magnetron sputtering (PMS) to deposit transparent...
Ultrathin glass is a new flexible material. It is distinguished from its polymer counterparts by a c...
Ultra-slim flexible glass as a new substrate material open sa wide range of new application fields. ...
This paper investigates the influence of film thickness on the electrical and mechanical properties ...
Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting di...
High quality indium tin oxide (ITO) thin films were grown without oxygen by both dc and RF magnetron...
Indium tin oxide (ITO) thin films for application in thin-film silicon solar cells with superior ele...
ITO thin films were deposited on flexible fluorinated ethylene propylene (FEP) substrates by pulsed ...
Transparent and conducting thin films on flexible substrates have enormous applications in the areas...
[[abstract]]In this research, we studied the effect of deflection on the characteristics of an indiu...
A large area magnetron source with the strongly confined magnetic field from all direction is applie...
This study presents the effect of oxygen flow rate on the optical, electrical, and mechanical proper...
In microelectronic applications the use of ultra-thin glass (UTG) to substitute materials like polym...
Tin doped indium oxide (ITO) coatings have been deposited on epoxy resin and glass substrates by low...
Tin doped indium oxide (ITO) coatings have been deposited on epoxy resin and glass substrates by low...
[[abstract]]Experiments were conducted using pulse magnetron sputtering (PMS) to deposit transparent...
Ultrathin glass is a new flexible material. It is distinguished from its polymer counterparts by a c...
Ultra-slim flexible glass as a new substrate material open sa wide range of new application fields. ...
This paper investigates the influence of film thickness on the electrical and mechanical properties ...
Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting di...
High quality indium tin oxide (ITO) thin films were grown without oxygen by both dc and RF magnetron...
Indium tin oxide (ITO) thin films for application in thin-film silicon solar cells with superior ele...
ITO thin films were deposited on flexible fluorinated ethylene propylene (FEP) substrates by pulsed ...
Transparent and conducting thin films on flexible substrates have enormous applications in the areas...
[[abstract]]In this research, we studied the effect of deflection on the characteristics of an indiu...
A large area magnetron source with the strongly confined magnetic field from all direction is applie...
This study presents the effect of oxygen flow rate on the optical, electrical, and mechanical proper...