High-speed surface structuring of polycarbonate using direct laser interference patterning: Toward 1m2 min-1 fabrication speed barrier

Periodic structures with micro- or sub-micrometer resolution can be used to improve the mechanical, biological, or optical properties of surfaces. Direct laser interference patterning combines high resolution (sub-micrometer feature sizes) with high fabrication speed. New processing heads for high-speed laser interference patterning of polycarbonate are introduced, which provide effective patterning speeds up to 0.9m2min-1. The surface topography of the processed polymer is analyzed by confocal microscopy and scanning electron microscopy. Focused ion beam is used to create cross-sections to determine the structuring mechanism. Finally, high-speed interference patterning is compared to conventional direct laser writing