Characterization of a miniaturized unimorph deformable mirror for high power cw-solid state lasers

We have developed a new type of unimorph deformable mirror for real-time intra-cavity phase control of high power cw-lasers. The approach is innovative in its combination of super-polished and pre-coated highly reflective substrates, the miniaturization of the unimorph principle, and the integration of a monolithic tip/tilt functionality. Despite the small optical aperture of only 9 mm diameter, the mirror is able to produce a stroke of several microns for low order Zernike modes, paired with a residual static root-mean-square aberration of less than 0.04 µm. In this paper, the characteristics of the mirror such as the influence functions, the dynamic behavior, and the power handling capability are reported. The mirror was subjected to a maximum of 490 W of laser-light at a wavelength of 1030 nm. Due to the high reflectivity of over 99.998 percent the mirror is able to withstand intensities up to 1.5 MW/cm2