The research aims to develop algorithms that can minimize the total lot processing time (makespan) of cluster tools used for semiconductor manufacturing. Previous research focuses on finding an optimal sequence of wafer handler moves in a cluster tool that has one process chamber in each stage. In practice, if the number of chambers in a stage is more than one, either a pre-specified sequence of moves is given in advance or a dispatching rule is applied. No previous work has addressed the problem of finding an optimal sequence of wafer handler moves to improve performance of cluster tools with more than one chamber in a stage. Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufacturing processes. ...
International audienceThere are wafer fabrication processes in cluster tools that require wafer revi...
Le système de fabrication des plaquettes de silicium (wafer) est la partie la plus complexe et la pl...
Multi-cluster tool is a highly automated and costly wafer fabrication system with multi-loop couplin...
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufactur...
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufactur...
International audienceMost of the wafer fabrication processes are chemical processes, and wafers are...
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufactur...
To ensure wafer quality, engineers have to impose wafer residency time constraints and chamber clean...
The semiconductor industry utilizes cluster tools with multiple processing modules and robotic arms ...
In semiconductor manufacturing, with the shrinking down of wafer circuit widths, a strict quality co...
In 450mm wafers production environment for next generation Fab, one of the most significant features...
Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex...
In semiconductor manufacturing, a cleaning operation that takes significant time is required for eli...
Abstract—Cluster tools are widely used as semiconductor manu-facturing equipment. While throughput a...
This paper presents wafer sequencing problems considering perceived chamber conditions and maintenan...
International audienceThere are wafer fabrication processes in cluster tools that require wafer revi...
Le système de fabrication des plaquettes de silicium (wafer) est la partie la plus complexe et la pl...
Multi-cluster tool is a highly automated and costly wafer fabrication system with multi-loop couplin...
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufactur...
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufactur...
International audienceMost of the wafer fabrication processes are chemical processes, and wafers are...
Cluster tools are highly integrated machines that can perform a sequence of semiconductor manufactur...
To ensure wafer quality, engineers have to impose wafer residency time constraints and chamber clean...
The semiconductor industry utilizes cluster tools with multiple processing modules and robotic arms ...
In semiconductor manufacturing, with the shrinking down of wafer circuit widths, a strict quality co...
In 450mm wafers production environment for next generation Fab, one of the most significant features...
Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex...
In semiconductor manufacturing, a cleaning operation that takes significant time is required for eli...
Abstract—Cluster tools are widely used as semiconductor manu-facturing equipment. While throughput a...
This paper presents wafer sequencing problems considering perceived chamber conditions and maintenan...
International audienceThere are wafer fabrication processes in cluster tools that require wafer revi...
Le système de fabrication des plaquettes de silicium (wafer) est la partie la plus complexe et la pl...
Multi-cluster tool is a highly automated and costly wafer fabrication system with multi-loop couplin...