A silicon backplane technology for microdisplays

A silicon backplane technology is described for the fabrication of high-resolution microdisplays. The technology is embedded in a 0.7 mum CMOS technology, and comprises DEMOS devices for enabling voltage spans of 12 V, and a special back-end processing module for planarizing the wafer and light shielding. This technology is used to develop a GXGA (2560times2048 pixels) microdisplay with 15 mum pixels on which the first results are reported