Deep Ultraviolet Lithography is essential for the mass production of silicon devices. To date, restrictions in the process have prevented the realization of high Q factor optical resonators. Here, we demonstrate Q-factor values of approx. 200,000 using an optimized design
We report on the realization of high-Q/V photonic crystal cavities in thin silicon membranes, with r...
Optical resonators with quality factor as high as 750 million are demonstrated. These silicon-chip-b...
We report on the realization of high-Q/V photonic crystal cavities in thin silicon membranes, with r...
Deep Ultraviolet Lithography is essential for the mass production of silicon devices. To date, restr...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
We report on the experimental realization of ultra-high quality factor (Q) designs of the L3-type ph...
We report on the experimental realization of ultra-high quality factor (Q) designs of the L3-type ph...
Photonic crystal cavities enable the realization of high Q-factor and low mode-volume resonators, wi...
We report on the realization of high-Q/V silicon photonic crystal cavities with resonance wavelength...
Photonic crystal cavities enable the realization of high Q-factor and low mode-volume resonators, wi...
Photonic crystal (PhC) nanocavities have demonstrated unique capabilities in terms of light confinem...
We report on the design and fabrication of high-Q silicon photonic crystal cavities operating at tel...
We report on the realization of high-Q/V photonic crystal cavities in thin silicon membranes, with r...
Optical resonators with quality factor as high as 750 million are demonstrated. These silicon-chip-b...
We report on the realization of high-Q/V photonic crystal cavities in thin silicon membranes, with r...
Deep Ultraviolet Lithography is essential for the mass production of silicon devices. To date, restr...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
High optical quality (Q) factors are critically important in optical microcavities, where performanc...
We report on the experimental realization of ultra-high quality factor (Q) designs of the L3-type ph...
We report on the experimental realization of ultra-high quality factor (Q) designs of the L3-type ph...
Photonic crystal cavities enable the realization of high Q-factor and low mode-volume resonators, wi...
We report on the realization of high-Q/V silicon photonic crystal cavities with resonance wavelength...
Photonic crystal cavities enable the realization of high Q-factor and low mode-volume resonators, wi...
Photonic crystal (PhC) nanocavities have demonstrated unique capabilities in terms of light confinem...
We report on the design and fabrication of high-Q silicon photonic crystal cavities operating at tel...
We report on the realization of high-Q/V photonic crystal cavities in thin silicon membranes, with r...
Optical resonators with quality factor as high as 750 million are demonstrated. These silicon-chip-b...
We report on the realization of high-Q/V photonic crystal cavities in thin silicon membranes, with r...
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