Cathodoluminescence mapping with an energy-dispersive x-ray detector: principle, simulation and application

An overview is given on the detection of cathodoluminescence in a scanning electron microscope and its importance in material science. A new method, using an energy dispersive x-ray detector, is described to collect panchromatic cathodoluminescence maps. We explain why this detector is sensitive to visible light and explain its behavior, both by numerical simulations and experiments. Finally, the advantages of the new method are illustrated on a BaAl2S4:Eu thin film, and the technique is compared to the conventional CL detection method in terms of spatial resolution and sensitivity