Enhancement of the performance of multipurpose thermopile-based sensor using proprietary mems technology for soi piezoresistive pressure sensors fabrication

MEMS senzori na bazi Zebekovog efekta su tema dugogodišnjeg istraživanja u IHTM-CMTM-u. Oni su posebno interesantni zbog činjenice da imaju raznovrsnu primenu (senzori protoka, senzori vakuuma, termalni konvertori, IC detektori, akcelerometri, inklinometri, biološki i hemijski senzori, senzori vrste gasa, senzori sastava binarne smeše gasova, ...). U IHTM-u je do sada realizovano nekoliko varijanti ovog tipa senzora. Prilikom razvoja ovih senzora teži se da se iskoriste postojeći tehnološki procesi razvijeni za IHTM piezorezistivne senzore pritiska. Tako je poslednja generacija senzora sa temoparovima tehnološki kompatibilna sa IHTM Si piezorezistivnim senzorima pritiska. U medjuvremenu je osvojena tehnologija izrade SOI piezorezistivnih senzora pritiska koja će biti primenjena za realizaciju sledeće generacije termalnih senzora. U ovom radu je dat osvrt na dizajn, tehnologiju izrade i poboljšanje performansi koje se očekuje kod SOI višenamenskih senzora sa termoparovima.MEMS sensors based on Seebeck effect have been a part of the long-term research at IHTM-CMTM. They are of special interest because of the fact that they have broad range of applications (flow sensors, vacuum sensors, thermal converters, IR detectors, accelerometers, inclinometers, biological and chemical sensors, gas type sensors, binary gas mixture composition sensors, ...). Till now several types of this kind of sensors have been developed at IHTM. During the development process we aim at using aleady existing technological processes developed for IHTM piezoresistive pressure sensors. Thus, the last generation of thermopile-based sensors is technologicaly compatible with IHTM Si piezoresisitve pressure sensors. In the meantime, a technology of SOI piezoresistive pressure sensors have been conquered and it will be applied for realization of the next generation of thermal sensors. This paper gives overview of the design, fabrication technology and performance improvement expected to be reached with SOI multipurpose thermopile-based sensors