Consideration of Thin Film Ionization Vacuum Pressure Sensor

A novel concept of vacuum pressure sensor based on thin film technology is presented. The sensor is designed as a 1 µm thick aluminium film patterned as a structure of wedges facing each other along a sharp tip. The distance between the wedge tips is 3 µm. This structure is obtained by laser writing in vector mode. Parts of the sensor structure are fabricated and measured. Analytical consideration of the proposed structure is given together with the concept of the experimental set up for testing of the senso