Patente de Invenção Nacional n.º 105759 (submetida)The present invention consists in a thermal accelerometer capable of detecting acceleration in multiple axes. The accelerometer is made of four microinjected polymeric parts, which can be two identical top parts and two identical central parts or four different parts, which are assembled with active polymeric membranes to construct the 3-axis acceleration sensing device. The microinjected parts provide mechanical support for the heater and temperature sensors that are placed on the membranes. The device operating gas medium is hermetically sealed by the polymer parts and electrical current applied to the heater causes the air to heat and external acceleration imposes a gradient of temper...
A three dimensional electro-thermal-fluidic FEM model is introduced in this paper and simulation re...
Des capteurs MEMS variés peuvent être fabriqués dans une technologie CMOS standard associée à une ou...
The miniaturization of parts is an essential step in the evolution of technology, where more functio...
Patente de Invenção Nacional n.º 105759 (submetida)The present invention consists in a thermal acce...
The present invention consists in a thermal accelerometer capable of detecting acceleration in mult...
A combined fabrication process using polymer and silicon planar microtechnologies is presented here...
A polymeric microinjected 3-axis thermal accelerometer is presented in this paper. The device has tw...
A polymeric microinjected 3-axis thermal accelerometer is presented in this paper. The device has tw...
AbstractA completely new approach for the fabrication of 3-axis thermal accelerometers is presented ...
A completely new approach for the fabrication of 3-axis thermal accelerometers is presented in this ...
AbstractA completely new approach for the fabrication of 3-axis thermal accelerometers is presented ...
In this paper we present an alternative fabrication method based on polymeric materials and technol...
AbstractAn acceleration sensor from polymer has been developed which balances a proof mass by magnet...
Usually micro machined acceleration sensors are silicon-based. There are two conspicuous advantages ...
A three dimensional electro-thermal-fluidic FEM model is introduced in this paper and simulation re...
A three dimensional electro-thermal-fluidic FEM model is introduced in this paper and simulation re...
Des capteurs MEMS variés peuvent être fabriqués dans une technologie CMOS standard associée à une ou...
The miniaturization of parts is an essential step in the evolution of technology, where more functio...
Patente de Invenção Nacional n.º 105759 (submetida)The present invention consists in a thermal acce...
The present invention consists in a thermal accelerometer capable of detecting acceleration in mult...
A combined fabrication process using polymer and silicon planar microtechnologies is presented here...
A polymeric microinjected 3-axis thermal accelerometer is presented in this paper. The device has tw...
A polymeric microinjected 3-axis thermal accelerometer is presented in this paper. The device has tw...
AbstractA completely new approach for the fabrication of 3-axis thermal accelerometers is presented ...
A completely new approach for the fabrication of 3-axis thermal accelerometers is presented in this ...
AbstractA completely new approach for the fabrication of 3-axis thermal accelerometers is presented ...
In this paper we present an alternative fabrication method based on polymeric materials and technol...
AbstractAn acceleration sensor from polymer has been developed which balances a proof mass by magnet...
Usually micro machined acceleration sensors are silicon-based. There are two conspicuous advantages ...
A three dimensional electro-thermal-fluidic FEM model is introduced in this paper and simulation re...
A three dimensional electro-thermal-fluidic FEM model is introduced in this paper and simulation re...
Des capteurs MEMS variés peuvent être fabriqués dans une technologie CMOS standard associée à une ou...
The miniaturization of parts is an essential step in the evolution of technology, where more functio...