Add to ORKGA micro-spectrometer has been realized based on an array of Fabry-Perot thin-film optical resonators. The 16 channel micro-spectrometer is IC fabrication compatible and operates in the visible spectral range with an inter-channel shift of 6 nm. Each of the channels is sensitive in a single peak with FWHM of 16 nm. A FWHM < 2 nm and finesse of 40 for narrowband operation is demonstrated.STW - Project DEL 55.3733. TUDelft. Fundação para a Ciência e Tecnologia - Praxis XXI-BD/5181/95
The trend in the development of single-point spectrometric sensors is miniaturization, cost reductio...
Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to op...
We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunabl...
A microspectrometer has been realized based on an array of Fabry--Perot optical thin-film filters. T...
A microspectrometer has been realized based on an array of Fabry–Perot optical thin-film filters. T...
Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line c...
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot Mi...
A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalo...
Optical microsystems with high spectral selectivity and fabrication compatible with a standard CMOS...
A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot (F–P...
[[abstract]]In this paper, we describe an integrated array type microspectrometer based on Fabry-Per...
VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands ...
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot Mic...
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot mic...
New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compa...
The trend in the development of single-point spectrometric sensors is miniaturization, cost reductio...
Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to op...
We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunabl...
A microspectrometer has been realized based on an array of Fabry--Perot optical thin-film filters. T...
A microspectrometer has been realized based on an array of Fabry–Perot optical thin-film filters. T...
Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line c...
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot Mi...
A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot etalo...
Optical microsystems with high spectral selectivity and fabrication compatible with a standard CMOS...
A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry–Perot (F–P...
[[abstract]]In this paper, we describe an integrated array type microspectrometer based on Fabry-Per...
VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands ...
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot Mic...
The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot mic...
New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compa...
The trend in the development of single-point spectrometric sensors is miniaturization, cost reductio...
Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to op...
We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunabl...