Add to ORKGThis paper presents a systematic characterization of a pure hydrogen capacitively coupled radio frequency discharge, produced in a parallel plate cylindrical setup, comparing experimental measurements obtained for such discharge with numerical simulations. A good agreement is found between simulation results and experimental measurements for the discharge main electrical parameters. A comparison of H atom absolute density LIF measurements with simulation results will also be presented
Apresentação em posterCapacitively coupled radio-frequency (ccrf) discharges in N2-H2 mixtures are b...
In this thesis low temperature hydrogen radio frequency (rf) plasmas discharges are modelled numeric...
In this thesis low temperature hydrogen radio frequency (rf) plasmas discharges are modelled numeric...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, p...
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio freq...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
This paper reviews the basis and the successes with the fluid modelling of capacitively coupled radi...
Capacitively coupled radio-frequency (ccrf) discharges are still among the most powerful and flexibl...
This work presents modeling and experimental results for the electrical characterization of capaciti...
International audienceParallel plate capacitively coupled plasmas (CCPs) are commonly used for mater...
LE TRAVAIL PRESENTE TRAITE DE LA MODELISATION ET DE LA CARACTERISATION DE DECHARGES RADIOFREQUENCE (...
In this paper we present a parametric study of the effect of discharge voltage on capacitively coup...
Hydrogen is the main component of many feeding mixtures used for plasma processing. Despite this, t...
Apresentação em posterCapacitively coupled radio-frequency (ccrf) discharges in N2-H2 mixtures are b...
In this thesis low temperature hydrogen radio frequency (rf) plasmas discharges are modelled numeric...
In this thesis low temperature hydrogen radio frequency (rf) plasmas discharges are modelled numeric...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
This paper investigates the dependence of plasma density and self-bias voltage with excitation frequ...
The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, p...
In this paper we present the self consistent coupling of a 2D model of a parallel plate radio freq...
This paper presents a systematic characterization of hydrogen capacitively coupled very high frequen...
This paper reviews the basis and the successes with the fluid modelling of capacitively coupled radi...
Capacitively coupled radio-frequency (ccrf) discharges are still among the most powerful and flexibl...
This work presents modeling and experimental results for the electrical characterization of capaciti...
International audienceParallel plate capacitively coupled plasmas (CCPs) are commonly used for mater...
LE TRAVAIL PRESENTE TRAITE DE LA MODELISATION ET DE LA CARACTERISATION DE DECHARGES RADIOFREQUENCE (...
In this paper we present a parametric study of the effect of discharge voltage on capacitively coup...
Hydrogen is the main component of many feeding mixtures used for plasma processing. Despite this, t...
Apresentação em posterCapacitively coupled radio-frequency (ccrf) discharges in N2-H2 mixtures are b...
In this thesis low temperature hydrogen radio frequency (rf) plasmas discharges are modelled numeric...
In this thesis low temperature hydrogen radio frequency (rf) plasmas discharges are modelled numeric...