We demonstrate in this study that a single focusing multiple collector inductively coupled plasma massspectrometer (MC-ICP-MS) equipped with a hexapole gas-collision cell (GV-instrument Isoprobe) canprecisely determine the d29Si (2S.D., 0.2&) using a total Si consumption of less than 14 nmole (390 ngSi). Testing and evaluation of background, rinse time, and major matrix effects have been performed ina systematic way to establish a procedure to measure d29Si in small quantities. Chemical purificationprior to analysis is required to remove potential interferences. For data collected during a four-yearperiod, the average d29Si value of IRMM-018 relative to NBS-28 was found to be 0.95& (n ¼ 23,2S.D. 0.16&) with a 95% confidence inte...