Full-range birefringence control with piezoelectric MEMS-based metasurfaces

Dynamic polarization control is crucial for emerging highly integrated photonic systems with diverse metasurfaces being explored for its realization, but efficient, fast, and broadband operation remains a cumbersome challenge. While efficient optical metasurfaces (OMSs) involving liquid crystals suffer from inherently slow responses, other OMS realizations are limited either in the operating wavelength range (due to resonances involved) or in the range of birefringence tuning. Capitalizing on our development of piezoelectric micro-electro-mechanical system (MEMS) based dynamic OMSs, we demonstrate reflective MEMS-OMS dynamic wave plates (DWPs) with high polarization conversion efficiencies (∼75%), broadband operation (∼100 nm near the operating wavelength of 800 nm), fast responses (