Design, Simulation, and Analysis of Physical Unclonable Functions with MEMS AlN Cantilevers

In recent years, Physical Unclonable Functions (PUFs) have gained significant attraction in the Internet of Things (IoT) for security applications such as cryptographic key generation and entity authentication. PUFs extract the uncontrollable production characteristics of physical devices to generate unique fingerprints for security applications. One common approach for designing PUFs is exploiting the intrinsic features of sensors and actuators such as MEMS elements, which typically exist in IoT devices. This work presents the Cantilever-PUF, a PUF based on a specific MEMS device – Aluminum Nitride (AlN) piezoelectric cantilever. We show the variations of electrical parameters of AlN cantilevers such as resonance frequency, electrical conductivity, and quality factor, as a result of uncontrollable manufacturing process variations. These variations, along with high thermal and chemical stability, and compatibility with silicon technology, makes AlN cantilever a decent candidate for PUF design. We present a cantilever design, which magnifies the effect of manufacturing process variations on electrical parameters. In order to verify our findings, the simulation results of the Monte Carlo method are provided. The results verify the eligibility of AlN cantilever to be used as a basic PUF device for security applications. We present an architecture, in which the designed Cantilever-PUF is used as a security anchor for PUF-enabled device authentication as well as communication encryption