Fabrication of Centimeter-Scale Plasmonic Nanoparticle Arrays with Ultranarrow Surface Lattice Resonances

Plasmonic surface lattice resonances (SLRs) supported by metallic nanoparticle (NP) arrays show diverse applications including nanolasers, sensors, photocatalysis, and nonlinear optics. However, to rationally fabricate high-quality plasmonic NP arrays with ultranarrow SLR line widths over large areas remains challenging. This article describes a general approach for the efficient fabrication of centimeter-scale inorganic NP arrays with precisely controlled NP size, composition, position, and lattice geometry. This method combines the processes of solvent-assisted soft lithography and in situ site-specific NP growth to reproducibly create many replicates of NP arrays without utilizing cleanroom and specialized equipment. For demonstration, we show that Au NP arrays exhibit ultranarrow SLRs with a line width of 4 nm and a quality factor of 218 toward the theoretical limit