High-Efficiency Broadband Polarization-Independent Reflective Grating with Double-Layer Dielectric Rectangle Groove in Littrow Mounting

The design and performance of a high-efficiency broadband and polarization-independent reflective grating is reported. The physical mechanism of the gratings can be described by the modal method. By using rigorous coupled wave analysis (RCWA) and simulated annealing (SA) algorithms, the parameters of grating were optimized. The calculated diffraction efficiencies of −1st order for TE and TM polarizations in Littrow mounting exceeded 95%, from 988 nm to 1122 nm, and by over 98% in the bandwidth ranging from 1015 nm to 1085 nm, with the value of polarization-dependent loss (PDL) lower than 0.06 dB. Moreover, the electric field distribution of the grating was simulated by the finite element method (FEM), which demonstrated that most of the energy of the incident light was diffracted to the −1st order and the electric field was distributed almost outside the grating. In addition, the great fabrication tolerances and incident angle tolerance ensured high performance of the designed grating in manufacture and application. With its properties of high efficiency, broadband, and polarization-independence, the designed grating should be of great interest for lots of practical applications, including chirped pulse amplification (CPA), interferometers, and spectrometers