Add to ORKGWe present a multi-scale finite element approach to simulate the effects of shocks on polysilicon MEMS sensors. We show how the crystal structure of the polysilicon film can be handled at the micro-scale to get insights into possible failure scenarios
In this work we discuss a multi-scale framework to model the shock-induced failure of polysilicon m...
In this paper the effects of accidental impacts on polysilicon MEMS sensors are investigated withi...
In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced bri...
We present a multi-scale finite element approach to simulate the effects of shocks on polysilicon ME...
The effects of mechanical shocks on polysilicon MEMS accelerometers are here investigated within th...
MEMS are often exposed to accidental shocks during service, specially when mounted on portable devic...
MEMS can be exposed to shock loadings, since they are often designed for portable devices. We recen...
Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involv...
Shock-induced failure of polysilicon MEMS is investigated by adopting a multi-scale approach. To und...
In this work we discuss a multi-scale framework to model the shock-induced failure of polysilicon m...
In this paper the effects of accidental impacts on polysilicon MEMS sensors are investigated withi...
In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced bri...
We present a multi-scale finite element approach to simulate the effects of shocks on polysilicon ME...
The effects of mechanical shocks on polysilicon MEMS accelerometers are here investigated within th...
MEMS are often exposed to accidental shocks during service, specially when mounted on portable devic...
MEMS can be exposed to shock loadings, since they are often designed for portable devices. We recen...
Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involv...
Shock-induced failure of polysilicon MEMS is investigated by adopting a multi-scale approach. To und...
In this work we discuss a multi-scale framework to model the shock-induced failure of polysilicon m...
In this paper the effects of accidental impacts on polysilicon MEMS sensors are investigated withi...
In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced bri...