Add to ORKGThe paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. Coupled finite element simulations of the electromechanical behavior have been performed to predict the functioning of the device. The proposed accelerometer has been fabricated and on-chip measurements are currently in progress
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
A new out-of-plane resonant micro-machined accelerometer has been designed, modelled and fabricated....
The paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting i...
The paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting i...
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geomet...
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geomet...
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geomet...
This paper discusses the design and testing results of a resonant accelerometer developed for integr...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
A new out-of-plane resonant micro-machined accelerometer has been designed, modelled and fabricated....
The paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting i...
The paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting i...
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geomet...
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geomet...
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geomet...
This paper discusses the design and testing results of a resonant accelerometer developed for integr...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for de- ...
A new out-of-plane resonant micro-machined accelerometer has been designed, modelled and fabricated....