Piezo-polymer-FET Devices Based Tactile Sensors for Humanoid Robots

This work presents novel POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) tactile sensing devices and the approach, for developing high density tactile sensing arrays for the fingertips of humanoid robot. The POSFET tactile sensing device is obtained by spin coating, and processing in situ, a piezoelectric polymers (PVDF-TrFE) film on the gate area of a MOS device. The feasibility study of the approach was earlier done by developing piezoelectric polymer-MEA (microelectrode array) based test chips - each comprising of 32 'taxels' (tactile elements) epoxy-adhered with a piezoelectric polymer (PVDF-TrFE) film. The successful implementation of POSFET touch sensing devices will be followed by their use in tactile sensing arrays. \ua9 2010 Springer Science+Business Media B.V