SAW Hydrogen Sensors with Pd/SnO₂ Layers

Pd/SnO2 bilayers for surface acoustic wave (SAW) sensors were obtained using pulsed laser deposition (PLD). Bilayers were made at several deposition pressures in order to observe the influence of the morphology of the sensitive films on the response of the sensors. The morphological properties were analyzed by scanning electron microscopy (SEM). The SnO2 monolayers were initially deposited on quartz substrates at 100, 400 and 700 mTorr, to observe their morphology at these pressures. The Pd/SnO2 bilayer depositions were made at 100 and 700 mTorr. The sensors realized with these sensitive films were tested at different hydrogen concentrations, in the range of 0.2–2%, at room temperature. In order to establish selectivity, tests for hydrogen, nitrogen, oxygen and carbon dioxide were carried out with SnO2-700, Pd-100/SnO2-700 and Pd-700/SnO2-700 sensors. The sensor with the most porous sensitive film (both films deposited at 700 mTorr) had the best results: a sensitivity of 0.21 Hz/ppm and a limit of detection (LOD) of 142 ppm. The morphology of the SnO2 film is the one that has the major influence on the sensor results, to the detriment of the Pd morphology. The use of Pd as a catalyst for hydrogen improved the sensitivity of the film considerably and the selectivity of the sensors for hydrogen