Growth of Highly-Ordered Metal Nanoparticle Arrays in the Dimpled Pores of an Anodic Aluminum Oxide Template

A reliable, scalable, and inexpensive technology for the fabrication of ordered arrays of metal nanoparticles with large areal coverage on various substrates is presented. The nanoparticle arrays were formed on aluminum substrates using a two-step anodization process. By varying the anodization potential, the pore diameter, inter-pore spacing, and pore ordering in the anodic aluminum oxide (AAO) template were tuned. Following a chemical etch, the height of the pores in the AAO membrane were reduced to create a dimpled membrane surface. Periodic arrays of metal nanoparticles were subsequently created by evaporating metal on to the dimpled surface, allowing for individual nanoparticles to form within the dimples by a solid state de-wetting process induced by annealing. The ordered nanoparticle array could then be transferred to a substrate of choice using a polymer lift-off method. Following optimization of the experimental parameters, it was possible to obtain cm2 coverage of metal nanoparticles, like gold and indium, on silicon, quartz and sapphire substrates, with average sizes in the range of 50–90 nm. The de-wetting process was investigated for a specific geometry of the dimpled surface and the results explained for two different film thicknesses. Using a simple model, the experimental results were interpreted and supported by numerical estimations