Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate
- VINCENZI D.
- BUTTURI M.A.
- GUIDI V.
- CAROTTA M.C.
- MARTINELLI G.
- GUARNIERI V.
- BRIDA S.
- MARGESIN B.
- GIACOMOZZI F.
- ZEN M.
- PIGNATEL G.U.
- VASILIEV A.A.
- PISLIAKOV A.V.
DOIAbstract
We report on the design, implementation and characterisation of a thick-film gas sensor deposited for the first time by screen-printing technique onto a micromachined hotplate, the microheater maintains a film temperature as high as 400°C with <30 mW of input power. The microheater consists of a dielectric stacked membrane equipped with embedded polysilicon resistors acting as heating element as well as temperature sensing elements. Extensive finite-element computer simulations were carried out during the design step to optimise the radial temperature gradient up to 1200°C/mm. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through aconventional low-power proportional integral ...
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