Supplementary data and information for 'Electron-Beam-Induced Carbon Contamination in STEM-in-SEM: Quantification and Mitigation'

This repository contains supplementary data and information for the journal article "Electron-beam-induced carbon contamination in STEM-in-SEM: Quantification and mitigation" (https://doi.org/10.1093/micmic/ozac003). It provides comprehensive documentation of the thickness evaluation procedure based on STEM images. The thickness evaluation procedure is packed into a PYTHON library that can run using the provided exemplary images. It can also be adapted and applied to other images and individual settings, as described in the documentation file PythonTDL_Documentation.pdf. K. Adrion prepared the library based on the scripts written by her and M. Hugenschmidt, which were used for evaluating contamination thicknesses in the before-mentioned publication and on a conference poster: https://doi.org/10.5445/IR/1000135526