Performance Analysis and Calibration of a Novel CMOS-MEMS Humidity Sensor

This Study presents calibration and performance analysis of a novel CMOSMEMS humidity sensor that is fabricated using 0.35 μm CMOS technology with embedded micro-heater operates at high temperature, temperature sensor and piezoresistors for the purpose of relative humidity measurements. The device has been fabricated yet to be analyzed and assessed on its performance to elevate the understanding of the device performance. This study also focuses on the study of the device response to humidity under different conditions of factors that affect the device measurements for relative humidity such as, temperature and frequency, in addition to the identification of the frequencies that is humidity sensitive and responding well. The device response to humidity that is done to identify the best linear results of relative humidity measurements in relation with the output voltage of Wheatstone quarter bridge read-out circuit of the device. This experimental research have been conducted beginning with device electrical properties, device operating temperature analysis, dynamic response of the device to identify the humidity sensitive signal of the device, and the study of device response to humidity