Displacement measuring interferometry is a crucial component in metrology applications. In this paper, we propose a fiber-based two-wavelength heterodyne interferometer as a compact and highly sensitive displacement sensor that can be used in inertial sensing applications. In the proposed design, two individual heterodyne interferometers are constructed using two different wavelengths, 1064 nm and 1055 nm; one of which measures the target displacement and the other monitors the common-mode noise in the fiber system. A narrow-bandwidth spectral filter separates the beam paths of the two interferometers, which are highly common and provide a high rejection ratio to the environmental noise. The preliminary test shows a sensitivity floor of 7.5...
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective ...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We present a new displacement measuring technique with simplicity, robustness, high sensitivity and ...
Displacement measuring interferometry is a crucial component in metrology applications. In this pape...
Precision displacement laser interferometry is crucial in various applications such as microlithogra...
This paper describes a novel heterodyne laser interferometer with no significant periodic nonlineari...
The Laser Interferometer Gravitational-Wave Observatory (LIGO) and the Laser Interferometer Space An...
The presented interferometer concept enables high-accuracy target displacement measurement in diffic...
High sensitivity displacement interferometer has wide applications in gravitational wave detection a...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
The advancement of a compact optomechanical inertial sensor with ultra-high acceleration sensitivity...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
The paper presents a prototype of a new displacement measuring system based on an optical interferom...
Tracking moving masses in several degrees of freedom with high precision and large dynamic range is ...
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective ...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We present a new displacement measuring technique with simplicity, robustness, high sensitivity and ...
Displacement measuring interferometry is a crucial component in metrology applications. In this pape...
Precision displacement laser interferometry is crucial in various applications such as microlithogra...
This paper describes a novel heterodyne laser interferometer with no significant periodic nonlineari...
The Laser Interferometer Gravitational-Wave Observatory (LIGO) and the Laser Interferometer Space An...
The presented interferometer concept enables high-accuracy target displacement measurement in diffic...
High sensitivity displacement interferometer has wide applications in gravitational wave detection a...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
The advancement of a compact optomechanical inertial sensor with ultra-high acceleration sensitivity...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
The paper presents a prototype of a new displacement measuring system based on an optical interferom...
Tracking moving masses in several degrees of freedom with high precision and large dynamic range is ...
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective ...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
We present a new displacement measuring technique with simplicity, robustness, high sensitivity and ...