Plasma nitriding is widely used in various industrial applications to improve surface hardness and wear properties. Especially for tool steels, it is also used to improve the support and adhesion of diamond-like carbon (DLC) coatings. The properties of the nitrided zone produced by plasma nitriding are influenced by the applied process parameter, in particular temperature and time. However, for high-alloy tool steels, a deeper understanding of the underlying diffusion processes of the nitrogen and the interaction with the existing microstructure, as well as the effects on the case depth is still lacking. Therefore, in this study, specimens of high-alloy tool steel X153CrMoV12 were plasma nitrided at varying temperatures (480 °C, 520 °C, 560...