Ion Composition of the Beam Plasma Generated by Electron-Beam Evaporation of Metals and Ceramic in the Forevacuum Range of Pressure

We present the results of measurements of the ion composition of the plasma generated by an accelerated electron beam in the forevacuum pressure range. It has been found that the main contribution to ionization processes comes from beam electrons. It has been shown that, during the electron-beam evaporation of metal or ceramic targets, the number of ions evaporated from the materials in the beam plasma significantly exceeds the number of ions produced from the residual atmosphere and admitted gases. Together, electron beams and beam-produced plasma can catalyze the processes of coatings deposition or modification of the surface layer of the samples