Multi-Layer Nanoelectromechanical (NEM) Memory Switches for Multi-Path Routing

Monolithic three-dimensional (M3D) multilayer nanoelectromechanical (NEM) memory switches are experimentally demonstrated for reconfigurable multi-path routing. The multi-layer NEM memory switch has moving mechanical beams in different metal layers which operate independently in a nonvolatile manner, including high impedance states. For example, double-layer NEM memory switches implement nine different memory states. It is predicted that our proposed n-layer NEM memory switches utilizing n metal layers will exhibit 3((n-1)) x higher routing flexibility and nx higher chip density than conventional single-layer NEM memory switches.N