Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Spectral characterization of solid-state laser-driven plasma sources of EUV light

Schupp, Ruben

March 2021

In this thesis, the fundamental limits of converting laser radiation via tin plasmas into EUV light ...

Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S. E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Physics of laser-produced plasma sources of extreme ultraviolet radiation

Versolato, O.O.
Kurilovich, D.
Torretti, F.
Schupp, R.
Scheers, J.
Deuzeman, M.J.
Bayerle, A.
Hoekstra, R.
Ubachs, W.

January 2018

Laser-produced tin plasmas are used for the generation of extreme ultraviolet light for nanolithogra...

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Versolato, Oscar O.
Schupp, Ruben
Behnke, Lars
Mostafa, Yahia Y.
Bouza, Zoi
Lassise, Adam
Bayraktar, Muharrem
Sheil, John
Hoekstra, Ronnie
Ubachs, Wim

January 2022

Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 1...

Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation

Behnke, L.
Schupp, R.
Bouza, Z.
Scheers, J.
Sheil, J.
Hoekstra, R.
Ubachs, W.
Versolato, O. O.

November 2020

Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-...

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Versolato, O. O.
Sheil, J.
Witte, S.
Ubachs, W.
Hoekstra, R.

May 2022

Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-of-the-a...

Efficient Generation of Extreme Ultraviolet Light from Nd:YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Meijer, R. A.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S.E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S. E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Versolato, O.
Bayerle, A.
Bayraktar, M.
Behnke, L.
Bekker, H.
Bouza, Z.
Colgan, J.
Crespo López Urrutia, J.
Deuzeman, M.
Hoekstra, R.
Kurilovich, D.
Liu, B.
Meijer, R.
Neukirch, A.
Poirier, L.
Rai, S.
Ryabtsev, A.
Scheers, J.
Schupp, R.
Sheil, J.
Torretti, F.
Ubachs, W.
Witte, S.

January 2020

Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in ...

Characterization of 1- and 2-mu m-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Schupp, R.
Behnke, L.
Sheil, J.
Bouza, Z.
Bayraktar, M.
Ubachs, W.
Hoekstra, R.
Versolato, O.O.

March 2021

Experimental spectroscopic studies are presented, in a 5.5-25.5 nm extreme-ultraviolet (EUV) wavelen...

Characterization of 1- And 2-μ m -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Schupp, R.
Behnke, L.
Sheil, J.
Bouza, Z.
Bayraktar, M.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

March 2021

Experimental spectroscopic studies are presented, in a 5.5-25.5 nm extreme-ultraviolet (EUV) wavelen...

Spectral characterization of solid-state laser-driven plasma sources of EUV light

Schupp, Ruben

March 2021

In this thesis, the fundamental limits of converting laser radiation via tin plasmas into EUV light ...

Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S. E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Physics of laser-produced plasma sources of extreme ultraviolet radiation

Versolato, O.O.
Kurilovich, D.
Torretti, F.
Schupp, R.
Scheers, J.
Deuzeman, M.J.
Bayerle, A.
Hoekstra, R.
Ubachs, W.

January 2018

Laser-produced tin plasmas are used for the generation of extreme ultraviolet light for nanolithogra...

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Versolato, Oscar O.
Schupp, Ruben
Behnke, Lars
Mostafa, Yahia Y.
Bouza, Zoi
Lassise, Adam
Bayraktar, Muharrem
Sheil, John
Hoekstra, Ronnie
Ubachs, Wim

January 2022

Extreme ultraviolet (EUV) nanolithography relies on CO2-lasers to drive EUV-emitting tin plasma at 1...

Solid-state-laser-produced microdroplet-Tin plasma sources of extreme ultraviolet radiation

Behnke, L.
Schupp, R.
Bouza, Z.
Scheers, J.
Sheil, J.
Hoekstra, R.
Ubachs, W.
Versolato, O. O.

November 2020

Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-...

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Versolato, O. O.
Sheil, J.
Witte, S.
Ubachs, W.
Hoekstra, R.

May 2022

Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-of-the-a...

Efficient Generation of Extreme Ultraviolet Light from Nd:YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Meijer, R. A.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S.E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S. E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Spectroscopic investigations of YAG-laser-driven microdroplet-tin plasma sources of extreme ultraviolet radiation for nanolithography

Versolato, O.
Bayerle, A.
Bayraktar, M.
Behnke, L.
Bekker, H.
Bouza, Z.
Colgan, J.
Crespo López Urrutia, J.
Deuzeman, M.
Hoekstra, R.
Kurilovich, D.
Liu, B.
Meijer, R.
Neukirch, A.
Poirier, L.
Rai, S.
Ryabtsev, A.
Scheers, J.
Schupp, R.
Sheil, J.
Torretti, F.
Ubachs, W.
Witte, S.

January 2020

Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in ...

Characterization of 1- and 2-mu m-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Schupp, R.
Behnke, L.
Sheil, J.
Bouza, Z.
Bayraktar, M.
Ubachs, W.
Hoekstra, R.
Versolato, O.O.

March 2021

Experimental spectroscopic studies are presented, in a 5.5-25.5 nm extreme-ultraviolet (EUV) wavelen...

Characterization of 1- And 2-μ m -wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Schupp, R.
Behnke, L.
Sheil, J.
Bouza, Z.
Bayraktar, M.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

March 2021

Experimental spectroscopic studies are presented, in a 5.5-25.5 nm extreme-ultraviolet (EUV) wavelen...

Spectral characterization of solid-state laser-driven plasma sources of EUV light

Schupp, Ruben

March 2021

In this thesis, the fundamental limits of converting laser radiation via tin plasmas into EUV light ...

Efficient Generation of Extreme Ultraviolet Light From Nd:YAG-Driven Microdroplet-Tin Plasma

Schupp, R.
Torretti, F.
Bayraktar, M.
Scheers, J.
Kurilovich, D.
Bayerle, A.
Eikema, K. S. E.
Witte, S.
Ubachs, W.
Hoekstra, R.
Versolato, O. O.

July 2019

We experimentally investigate the emission of EUV light from a mass-limited laser-produced plasma ov...

Physics of laser-produced plasma sources of extreme ultraviolet radiation

Versolato, O.O.
Kurilovich, D.
Torretti, F.
Schupp, R.
Scheers, J.
Deuzeman, M.J.
Bayerle, A.
Hoekstra, R.
Ubachs, W.

January 2018

Laser-produced tin plasmas are used for the generation of extreme ultraviolet light for nanolithogra...

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Abstract

Extracted data

Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Abstract

Extracted data

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