Porosity of Low-κ Materials Studied by Slow Positron Beam
- Brusa, R. S.
- Macchi, C.
- Mariazzi, S.
- Karwasz, G. P.
Publication date
April 2005
DOI Publisher
Institute of Physics, Polish Academy of SciencesAbstract
The information about porosity in low-κ materials obtainable by depth profiling with positron annihilation spectroscopy is reviewed. In particular we focus on Doppler broadening spectroscopy and 2-3γ ratio of positronium measurements on SiOCH and amorphous carbon a-C:F:H thin films produced by plasma enhanced chemical vapour deposition
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