In displacement measurements by two-beam interferometers, the wavefront curvature of a laser beam causes a systematic increase of the fringe period. This increase depends on beam collimation: It is null for a plane wave and proportional to the squared divergence of the beam. With interfering beams not perfectly recombined, an additional fringe-period error is caused, with the effect of counteracting and also of compensating for and prevailing over the usual error. We describe this hitherto unsuspected effect and give a correction equation. (c) 2006 Optical Society of America
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The coefficient of reflection of plane parallel plate beam splitters is very often taken as twice th...
The omnipresent tilt-to-length coupling in two-beam laser interferometers, frequently a nuisance in ...
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The wavefronts are rotated or reversed with respect to each other when a plane mirror is used in one...
In this paper we study the effects of changing the operating laser wavelength on the projection lens...
Expressions are obtained in this paper for the irradiance distribution in the fringe systems in doub...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
By using the formalism developed in Part I, we investigated errors in the measurement of the silicon...
The application of a shearing interferometer consisting of two identical gratings to measurements of...
We have developed a null laser interferometer capable of picometer resolution in fringe division for...
This paper deals with the impact of wavefront errors, due to the optical aberrations of a two-beam i...
The article deals with the effects of light bounces in high-accuracy two-beam interferometers. Parti...
The article illustrates the use of Fourier optics to describe the operation of two-beam scanning las...
We consider the effects of misalignment in a two-beam interferometer resulting from lateral displace...
When the rays emerging from a conventional two-beam interferometer are reflected back through the in...
The coefficient of reflection of plane parallel plate beam splitters is very often taken as twice th...
The omnipresent tilt-to-length coupling in two-beam laser interferometers, frequently a nuisance in ...
A typical application for laser interferometers is a precision measurement of length changes that re...
The wavefronts are rotated or reversed with respect to each other when a plane mirror is used in one...
In this paper we study the effects of changing the operating laser wavelength on the projection lens...
Expressions are obtained in this paper for the irradiance distribution in the fringe systems in doub...
Many error sources can affect the accuracy of displacement measuring interferometer systems. In hete...
By using the formalism developed in Part I, we investigated errors in the measurement of the silicon...
The application of a shearing interferometer consisting of two identical gratings to measurements of...
We have developed a null laser interferometer capable of picometer resolution in fringe division for...