Determining Chemically and Spatially Resolved Atomic Profile of Low Contrast Interface Structure with High Resolution

We present precise measurements of atomic distributions of low electron density contrast at a buried interface using soft x ray resonant scattering. This approach allows one to construct chemically and spatially highly resolved atomic distribution profile upto several tens of nanometer in a non destructive and quantitative manner. We demonstrate that the method is sensitive enough to resolve compositional differences of few atomic percent in nano scaled layered structures of elements with poor electron density differences 0.05 . The present study near the edge of potential impurities in soft x ray range for low Z system will stimulate the activity in that fiel