Mechanisms of formation of sputtered particles in excited states at Ar ion bombardment of oxide targets

Investigations of the main parameters of the ion photon emission during the Ar ions bombardment of the complex oxides MgO nAl2O3 were provided. Spectral composition of the emitted light, relative intensities of different lines, and dependences of lines intensity on the distance from the target surface give information on process of sputtering of the particles and their formation in different exited states. It was shown that under the bombardment with Ar ions the excited atoms of metal Al and Mg are formed as in the process of multiple collisions so under the development of linear cascades. Formation of the excited sputtered ions Mg takes place only during the process of multiple collisions. For deeply situated levels an essential contribution in formation of the excited states of sputtered particles gives mechanism of cascade populatio