Robotic Micro-assembly of microparts using a piezogripper.

International audienceThis paper deals with robotic micro-assembly of silicon micro-objects whose sizes are tens of micrometers. This production means is one of a more promising approach to realize 3D and/or hybrid microsystems. Current works in robotic micro-assembly are focused on the assembly of microobjects on a large substrate. We are focusing in the study of micro-parts assembly to build microscopic subsystems usable in larger products. This approach requires specific functionalities like a ‘micro-vise' required to block the first object during assembly. Original strategies are proposed and applied on an experimental robotic structure composed of micropositionning stages, videomicroscopes, piezogripper, and silicon endeffectors. Some experimental teleoperated micro-assemblies has validated the proposed methods and the reliability of the principles. Future works will be focused on micro-assembly automation