A new acoustic resonator concept based on acoustic waveguides using Silicon/Periodically Poled Transducer/Silicon structures for RF applications
- Bassignot, F.
- Ulliac, G.
- Lesage, J.-M.
- Garcia, J.
- Courjon, E.
- François, B.
- Ballandras, S.
Publication date
May 2011
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
International audienceWe propose a new acoustic resonator concept based on a periodically poled transducer (PPT) in a piezoelectric substrate (LiNbO(3) or LiTaO(3)), embedded between two guiding substrates in order to create an acoustic waveguide. A resonator operating at 131MHz have been successfully fabricated and used in order to stabilize an oscillator. However the fabricated resonator presents a significant thermal sensitivity. The following experiments have consisted in studying a Si/thinned PPT layer/Si in order to reduce the thermal sensitivity
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