Open-Loop control approaches to compliant micromanipulators.

International audienceOne of the major difficulties in the control of miicrorobots and microsystems lies in the fact that the specified performance (submicrometric resolutions and precisions) requires the use of high-performing sensors and efficient control techniques. The control techniques currently used for these robots and systems utilize bulky and expensive instruments and sensors in order to ensure this high performance. Indeed, the existing sensors that can be easilyl embedded into the microrobots that are of low cost do not have the necessary level of performance (very high resolution and precision) for real-time control. This is the principal reason why exteroceptive sensors are foten used. This greatly restricts the microrobot's mobility for use in a restricted environment. However, the need for manipulators to operate in restricted environments (i.e. within Transmission Electron Microscopes (TEMs) or a human body) is becoming increasingly significant