Fabrication of Bragg Gratings on LiNbO3 optical waveguides

International audienceWe report on three approaches to achieve Bragg Gratings structures (BGs) on X-cut lithium niobate substrates. The first method relies on Reactive Ionic Etching with fluorine gases. The second process is based on Focused Ion Beam milling (FIB) to etch BGs in classical optical waveguides and the last one combines the use of lateral FIB etching and deep-etched ridge optical waveguides defined by "optical grade dicing". Optical characterizations will be performed on each structure