Gallium Arsenide acoustic wave sensor for bio-sensing applications: Acoustic transducer design and microfabrication

Entretiens Jacques Cartier, Colloque 6 : " Santé, Biologie, Micronanosystèmes " - Lyon, France 25 - 26 novembre 2013 - PosterHealth care appears to provide the best opportunity for micro-sensor development, but many of these are based on expensive technologies. Resonant micro-sensors are promising devices for real-time nonlabeling detection of biomolecular interactions. In that way, we have decided to develop high sensitive piezoelectric sensors in Gallium Arsenide for biological detection in liquid environment. Gallium Arsenide (GaAs) presents interesting alternative to quartz crystal concerning resonant biosensors thanks to its piezoelectric and acoustic properties, and the ability of direct biofunctionalization of its surface. This kind of device opens up new opportunities to fabricate sensor using low cost processes