Internal resonances in nonlinear nanocantilever arrays under electrostatic actuation

International audienceThe nonlinear dynamics of nanoelectromechanical cantilever arrays is investigated using a comprehensive analytical multiphysics model that takes into account geometric and electrostatic nonlinearities. In particular, the internal resonances between the different cantilevers are analyzed using a multi-modal Galerkin discretization coupled with a perturbation technique. Such systems offer a perfect mechanical synchronization, interesting nonlinear behaviors and exchange of energy between their different components which makes them potential candidates for multi-mass sensing applications