5 pagesInternational audienceA novel micro-machining technique for silicon deep anisotropic etching and isolating porous siliconstructure formationis developped in this paper. This method combines aluminum thermomigration through a N type silicon wafer and silicon electrochemicaletching in a HF-based solution.Using this technique, high aspect ratio trenches (1:5) and porous silicopn isolating regions have been achievedthrough the entire thickness of the silicon wafers. Each rate measurements have been performed varying the anodization current density. A maximum value of 22µm/mn has been obtained. Moreover the porosity behavior with the current density increase is also discussed
Electrochemical etching of silicon in hydrofluoric acid (HF) solution is employed as a micromachinin...
To obtain of different microdevices apply techniques such as LIGA, surface and bulk micromashinning ...
The sharp selectivity of HF anodic etching between p-Si and n-Si is used to realize monocrystalline ...
In this work an equipment was built and tested for the electrochemical etching of silicon in hydrofl...
MEMS technology requires low cost techniques to permit large scale fabrication for production. Porou...
We report on the controlled electrochemical etching at room temperature of deep (up to 200 μm) silic...
The controlled electrochemical etching at room temperature of deep (up to 200 μm) silicon microstruc...
The controlled electrochemical etching at high anodic voltage (up to 35 V) of two-dimensional arrays...
[[abstract]]An electrochemical etching technique is suitable to the application of MEMS silicon bulk...
In this work the authors report on the controlled electrochemical etching of high-aspect-ratio (from...
In this paper the electrochemical silicon etching in HF-based solution is demonstrated as a new tech...
μTAS is hot in micromechanics today. All μTAS devices contain channels to connect the different comp...
Dry anisotropic etching of silicon is an important technology for fabrication of MEMS (micro-electro...
The anodic dissolution of silicon in acidic electrolytes is a well-known technology enabling the sil...
Effect of different anodisation current on porous silicon is investigated by STM (Scanning Tunneling...
Electrochemical etching of silicon in hydrofluoric acid (HF) solution is employed as a micromachinin...
To obtain of different microdevices apply techniques such as LIGA, surface and bulk micromashinning ...
The sharp selectivity of HF anodic etching between p-Si and n-Si is used to realize monocrystalline ...
In this work an equipment was built and tested for the electrochemical etching of silicon in hydrofl...
MEMS technology requires low cost techniques to permit large scale fabrication for production. Porou...
We report on the controlled electrochemical etching at room temperature of deep (up to 200 μm) silic...
The controlled electrochemical etching at room temperature of deep (up to 200 μm) silicon microstruc...
The controlled electrochemical etching at high anodic voltage (up to 35 V) of two-dimensional arrays...
[[abstract]]An electrochemical etching technique is suitable to the application of MEMS silicon bulk...
In this work the authors report on the controlled electrochemical etching of high-aspect-ratio (from...
In this paper the electrochemical silicon etching in HF-based solution is demonstrated as a new tech...
μTAS is hot in micromechanics today. All μTAS devices contain channels to connect the different comp...
Dry anisotropic etching of silicon is an important technology for fabrication of MEMS (micro-electro...
The anodic dissolution of silicon in acidic electrolytes is a well-known technology enabling the sil...
Effect of different anodisation current on porous silicon is investigated by STM (Scanning Tunneling...
Electrochemical etching of silicon in hydrofluoric acid (HF) solution is employed as a micromachinin...
To obtain of different microdevices apply techniques such as LIGA, surface and bulk micromashinning ...
The sharp selectivity of HF anodic etching between p-Si and n-Si is used to realize monocrystalline ...