A micro-floating element wall shear stress sensor with backside connections has been developed for accurate measurements of wall shear stress under the turbulent boundary layer. The micro-sensor was designed and fabricated on a 10.16 cm SOI (Silicon on Insulator) wafer by MEMS (Micro-Electro-Mechanical System) processing technology. Then, it was calibrated by a wind tunnel setup over a range of 0 Pa to 65 Pa. The measurements of wall shear stress on a smooth plate were carried out in a 0.6 m × 0.6 m transonic wind tunnel. Flow speed ranges from 0.4 Ma to 0.8 Ma, with a corresponding Reynold number of 1.05 × 106~1.55 × 106 at the micro-sensor location. Wall shear stress measured by the micro-sensor has a range of about 34 P...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a tur...
An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a tur...
The accurate measurement of airflows is an important area of experimental aerodynamics. MEMS technol...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
Abstract. From a fluid dynamics perspective, the introduction of microelectromechanical systems (MEM...
In wall-bounded turbulent flows, determination of the wall shear stress is an important task. A prim...
From a fluid dynamics perspective, the introduction of microelectromechanical systems (MEMS) has con...
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent ...
In wall-bounded turbulent flows, determination of the wall shear stress is an important task. A prim...
A floating-element skin friction meter was made by ourselves to measure the shear stress acting on t...
A silicon-based micromachined, floating-element sensor for low-magnitude wall shear-stress measureme...
A floating-element skin friction meter was made by ourselves to measure the shear stress acting on t...
ABSTRACT: In this letter we present a novel wall shear stress measurement technique for a turbulent ...
The accelerated development of silicon micromachined sensors and actuators has meant that many new a...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a tur...
An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a tur...
The accurate measurement of airflows is an important area of experimental aerodynamics. MEMS technol...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
Abstract. From a fluid dynamics perspective, the introduction of microelectromechanical systems (MEM...
In wall-bounded turbulent flows, determination of the wall shear stress is an important task. A prim...
From a fluid dynamics perspective, the introduction of microelectromechanical systems (MEMS) has con...
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent ...
In wall-bounded turbulent flows, determination of the wall shear stress is an important task. A prim...
A floating-element skin friction meter was made by ourselves to measure the shear stress acting on t...
A silicon-based micromachined, floating-element sensor for low-magnitude wall shear-stress measureme...
A floating-element skin friction meter was made by ourselves to measure the shear stress acting on t...
ABSTRACT: In this letter we present a novel wall shear stress measurement technique for a turbulent ...
The accelerated development of silicon micromachined sensors and actuators has meant that many new a...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a tur...
An integrated silicon pressure-shear stress sensor has been designed, fabricated and tested in a tur...