Phase Stability and Properties of Ti-Nb-Zr Thin Films and Their Dependence on Zr Addition

Ternary Ti-Nb-Zr alloys were prepared by a magnetron sputtering method with porous structures observed in some of them. In bulk, in order to control the porous structure, a space holder (NH4HCO3) is used in the sintering method. However, in the present work, we show that the porous structure is also dependent on alloy composition. The results from Young’s modulus tests confirm that these alloys obey d-electrons alloy theory. However, the Young’s modulus of ternary thin films (≈80–95 GPa) is lower than that for binary alloys (≈108–123 GPa). The depth recovery ratio of ternary Ti-Nb-Zr thin films is also higher than that for binary β-Ti-(25.9–34.2)Nb thin film alloys