Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices

Shape memory alloys (SMAs) are a class of smart materials characterized by shape memory effect and pseudo-elastic behavior. They have the capability to retain their original form when subjected to certain stimuli, such as heat or a magnetic field. These unique properties have attracted many researchers to seek their application in various fields including transportation, aerospace, and biomedical. The ease process adaption from semiconductor manufacturing technology provides many opportunities for designing micro-scale devices using this material. This paper gives an overview of the fabrication and manufacturing technique of thin-film and bulk micromachined SMAs. Key features such as material properties, transformation temperature, material composition, and actuation method are also presented. The application and micromechanism for both thin-film and bulk SMA are described. Finally, the microactuator devices emphasized for biomedical applications such as microgrippers and micropumps are highlighted. The presented review will provide information for researchers who are actively working on the development of SMA-based microscale biomedical devices